二维振镜扫描系统调向误差分析-豆柴文库

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二维振镜扫描系统调向误差分析
Abstract:
Two-dimensionalscanningmirrorsystemiswidelyusedinlaserscanningconfocalmicroscopy(LSCM)andotheropticalimagingsystems.Theaccuratealignmentofthescanningmirrorsisacriticalfactorintheperformanceofthesystem.Inthispaper,weanalyzethesourcesofalignmenterrorsandpresentmethodsformeasuringandcorrectingtheseerrors.
Introduction:
Two-dimensionalscanningmirrorsystemsarewidelyusedinopticalimagingsystemssuchasconfocalmicroscopy,OCT,andlaserprinting.Theperformanceofthescanningmirrorsiscriticalforthequalityoftheimagingsystem.Thealignmentofthemirrorsdeterminestheaccuracyofscanningandthequalityoftheimage.Inthispaper,wewilldiscussthesourcesofmisalignmentandpresentmethodsformeasuringandcorrectingthem.
SourcesofMisalignment:
Thereareseveralsourcesofmisalignmentin2Dscanningmirrorsystems.Theseincludemechanicalandelectricalerrors,aswellasenvironmentalissues.
MechanicalErrors:Themechanicalerrorsincludethemisalignmentofthemirrorsurfacetoitscenterofrotation,mechanicaldeformationofthescannerstructure,andmirrormountingerrors.Themisalignmentofthemirrorsurfacecancauseastigmatisminthescannedimage,whilemechanicaldeformationofthescannerstructurecancausedistortionandreducedscanningaccuracy.Themirrormountingerrorscanalsocausemisalignmentandreducethequalityofthescannedimage.
ElectricalErrors:Electricalerrorsarecausedbytheelectricalsignalsenttothescanningmirrors.Anyphasedelayoramplitudedifferencesinthesignalcancausedeviationofthescanninganglefromthedesiredposition.Thiscanleadtoerrorsinthescannedimage,especiallywhenscanningathighfrequencies.
EnvironmentalIssues:Environmentalissuessuchastemperaturechanges,vibration,andairturbulencecanalsocausemisalignmentinthescanningmirrors.Temperaturechangescancauseexpansionorcontractionofthescannerstructure,whichcanleadtomechanicalerrors.Vibrationandairturbulencecancausemechanicaldisturbancesinthescannerstructure,whichcanalsocausemisalignment.
MeasurementandCorrectionMethods:
Thereareseveralmethodsformeasuringthealignmenterrorsin2Dscanningmirrorsy