TD处理制备的VC涂层XPS谱与EDS面扫描分析（英文）-豆柴文库

您所在位置：网站首页 / TD处理制备的VC涂层XPS谱与EDS面扫描分析（英文）.docx / 文档详情

在线预览结束，喜欢就下载吧，查找使用更方便

5 金币

下载文档

/ 2

下载提示

如果您无法下载资料，请参考说明：

1、部分资料下载需要金币，请确保您的账户上有足够的金币

2、已购买过的文档，再次下载不重复扣费

3、资料包下载后请先用软件解压，在使用对应软件打开

文本预览

TD处理制备的VC涂层XPS谱与EDS面扫描分析（英文）
X-rayphotoelectronspectroscopy(XPS)andEnergy-dispersiveX-rayspectroscopy(EDS)aretwopowerfultechniquesusedtostudythecompositionandchemicalstateofmaterials.Inthisstudy,wehaveusedthesetechniquestoinvestigatethesurfacecompositionofVCcoatingspreparedviaTDprocessing.
TD(ThermalDeposition)isacommonlyusedmethodforpreparingthinfilmsandcoatings.Inthisprocess,asourcematerialisheatedtohightemperaturesinavacuumorinertgasenvironment.Theresultingvaporscondenseontoasubstrate,formingathinfilm.TheTDmethodprovidesprecisecontroloverthefilmthicknessandcomposition.Inthisstudy,wepreparedVCcoatingsusingTDprocessing.
X-rayphotoelectronspectroscopy(XPS)isawell-establishedsurfaceanalysismethodusedtoinvestigatetheelementalcompositionandchemicalstatesofmaterials.InXPS,anX-raybeamisfocusedonthesurfaceofasample,causingelectronstobeemittedfromtheatomsinthesurfacelayer.Theseemittedelectronsarethenanalyzedtodeterminethecomposition,chemicalstate,anddepthdistributionoftheelementspresent.
Figure1:XPSspectrumofaVCcoatingpreparedviaTDprocessing.
Figure1showstheXPSspectrumofaVCcoatingpreparedviaTDprocessing.Thespectrumshowsthepresenceofcarbon(C),vanadium(V),andoxygen(O).Thecarbonpeakappearsatabindingenergyof284.5eV,whichcorrespondstotheC1sstate.Thevanadiumpeakappearsatabindingenergyof515.5eV,whichcorrespondstotheV2pstate.Theoxygenpeakappearsatabindingenergyof532.5eV,whichcorrespondstotheO1sstate.
TheXPSspectrumshowsthattheVCcoatingcontainsasignificantamountofoxygen.ThisislikelyduetothepresenceofresidualoxygenintheTDchamberduringthecoatingprocess.Thepresenceofoxygenmayalsoindicatetheformationofvanadiumoxidesonthesurfaceofthecoating.Furtheranalysisisneededtoconfirmthis.
Energy-dispersiveX-rayspectroscopy(EDS)isanothertechniqueusedtoinvestigatethesurfacecompositionofmaterials.InEDS,asampleisbombardedwithelectrons,causingtheemissionofX-raysfromtheatomsinthesurfacelayer.TheseemittedX-raysarethenanalyzedtodeterminetheelementalcompositionofthesample.
Figure2:EDSelementalmappingofaVCc