一种基于光学集成芯片的紧凑型结构光产生系统（英文）-豆柴文库

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一种基于光学集成芯片的紧凑型结构光产生系统（英文）
Introduction
Structuredlight,atechniquewidelyusedin3Dimagingandmetrology,hasalwaysbeenanimportanttopicinthefieldofopticalinformationprocessing.Ittypicallyconsistsofpatternsoflightanddarkregions,suchasasinusoidalorstripepattern.Thesepatternscanbeusedtoinfertheshape,distance,andorientationofobjectsinthescene.However,conventionalstructuredlightsystemsusuallyrequirelargeandcomplexopticalsetupstoproducehigh-qualitypatterns,whichlimitstheirapplicationinvariousscenarios.
Toovercomethislimitation,weproposeacompactstructuredlightgenerationsystembasedonanintegratedopticalchip.Thissystemuseswaveguidesandphasemodulatorstoproducehigh-qualitystructuredlightpatternswithhighefficiencyandcompactsize.Inthispaper,wewilldiscussthedesign,fabrication,andexperimentalresultsoftheproposedsystem.
DesignandFabrication
Theproposedsystemconsistsoftwokeycomponents:awaveguidearrayandaphasemodulatorarray.Thewaveguidearrayisusedtotransportlightefficientlyandpreciselytoeachphasemodulator,whilethephasemodulatorsareusedtoimpartaphaseshifttothelightandgeneratestructuredlightpatterns.
Thewaveguidearrayisdesignedasatwo-dimensionalgridofstraightwaveguideswithaspacingofafewmicrometersbetweenthem.Thewaveguidesaremadeofsilicondioxide,whichhashightransparencyinthevisibleandnear-infraredrange.Thewaveguidearrayisthenpatternedontoasiliconsubstrateusingstandardphotolithographyandreactiveionetchingtechniques.
Thephasemodulatorarrayisdesignedasanarrayofphaseshifters,eachconsistingofaMach-Zehnderinterferometer(MZI)withtwothermo-opticphaseshifters.TheMZIisacommontypeofinterferometerthatsplitstheinputlightintotwoarms,whichthenrecombineandinterferewitheachother.Bychangingthetemperatureofthephaseshifters,therelativephasedifferencebetweenthetwoarmscanbecontrolled,whichinturnchangestheoverallphaseoftheoutputlight.
Thephasemodulatorarrayisfabricatedusingacombinationofsiliconphotonicsandmicro-electromechanicalsystem(MEMS)techniques.Thephaseshiftersaremadeofathinlayerofsiliconnitridedepositedontopof