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基于光纤布拉格光栅和放大基片的高灵敏度微位移传感器(英文) Title:High-SensitivityMicrodisplacementSensorbasedonFiberBraggGratingandAmplifiedSubstrate Abstract: Microdisplacementsensingplaysacrucialroleinmanyfields,suchasrobotics,structuralhealthmonitoring,andaerospaceengineering.Thispaperpresentsanovelhigh-sensitivitymicrodisplacementsensorbasedonacombinationoffiberBragggrating(FBG)andanamplifiedsubstrate.Theproposedsensoroffersenhancedsensitivity,accuracy,androbustnessoverexistingsensors,makingitsuitableforprecisedisplacementmeasurementsinvariousapplications. 1.Introduction Microdisplacementsensingisthemeasurementofminutedisplacementswithsub-micrometerresolution.Itfindsapplicationsinawiderangeoffields,includingmachineautomation,medicaldiagnostics,andnanotechnology.Traditionalsensingtechniques,suchaspotentiometersandLVDTs,havelimitationsintermsofsize,accuracy,andreliability.FiberBragggrating(FBG)sensorshaveemergedasapromisingalternativeduetotheirnumerousadvantages,includingsmallsize,non-intrusiveness,andimmunitytoelectromagneticinterference. 2.PrincipleofOperation TheproposedmicrodisplacementsensorconsistsofaFBGattachedtoanamplifiedsubstrate.TheFBGactsasastrainsensor,whiletheamplifiedsubstrateenhancesthesensitivityofthesystem.Whenadisplacementisapplied,theFBGexperiencesstrain,leadingtoashiftinitsBraggwavelength.Thisshiftisdetectedusinganopticalinterrogationsystem,enablingthemeasurementoftheapplieddisplacement. 3.DesignandFabrication ThedesignofthesensorinvolvescarefulselectionofmaterialsforboththeFBGandtheamplifiedsubstrate.TheFBGisfabricatedbyexposingasectionofopticalfibertoperiodicultravioletlight,creatingagratingstructurethatreflectsaspecificwavelength.Theamplifiedsubstrateisdesignedbasedontheprinciplesofmechanicalamplification,enablingtheenhancementofthestrainexperiencedbytheFBG.ThefabricationprocessinvolvesprecisionmachiningandbondingtechniquestoensureproperalignmentandsecureattachmentoftheFBGandtheamplifiedsubstrate. 4.ExperimentalResults Theperformanceofthesensorisevaluatedthroughvarious

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