基于石英MEMS技术的光纤法布里-珀罗高温压力传感器（英文）-豆柴文库

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基于石英MEMS技术的光纤法布里-珀罗高温压力传感器（英文）
Title:Fiber-OpticFabry-PérotHigh-TemperaturePressureSensorbasedonQuartzMEMSTechnology
Abstract:
Thispaperpresentstheconceptanddesignofafiber-opticFabry-Pérothigh-temperaturepressuresensorbasedonquartzMEMS(Micro-electro-mechanicalsystems)technology.ThesensorutilizestheFabry-Pérotinterferometricprincipletomeasurepressurebymonitoringthechangeinthecavitylength.Duetothehigh-temperaturestabilityofquartz,thissensorexhibitsexcellentperformanceinharshenvironments.Theworkingprinciple,fabricationprocess,andexperimentalresultsofthesensorarediscussedindetail.Theproposedsensorofferspotentialapplicationsinhigh-temperatureenvironmentssuchasaerospace,oilandgasindustries,andchemicalprocessingplants.
1.Introduction
Pressuresensorshavebeenwidelyusedinmanyapplications,includingindustrialprocesscontrol,automotivesystems,medicaldevices,andenvironmentalmonitoring.Traditionalpressuresensorsoftenencounterlimitationswhenitcomestohigh-temperatureoperationsduetothethermalexpansionofcomponentsandthedegradationofmaterials.Toovercomethesechallenges,afiber-opticFabry-Pérothigh-temperaturepressuresensorbasedonquartzMEMStechnologyisproposedinthispaper.Thissensordemonstratessignificantadvantagesintermsofhigh-temperaturestabilityandreliability.
2.WorkingPrinciple
ThesensorconsistsofaFabry-Pérotcavityformedbytwoconjugatequartzmirrors.Thepressure-induceddisplacementofoneofthemirrorschangesthelengthofthecavity,resultinginashiftoftheinterferencefringepattern.Bymonitoringthefringeshift,theappliedpressurecanbeaccuratelydetermined.Theuseofquartzasthemicro-mirrormaterialensuresthesensor'sstabilityandrobustnessinhigh-temperatureenvironments.
3.FabricationProcess
Thefabricationprocessofthesensorinvolvesseveralkeysteps.Firstly,athinfilmofquartzisdepositedontoasiliconsubstrateusingaRFsputteringsystem.Subsequently,photolithographyanddeepreactiveionetching(DRIE)techniquesareemployedtodefinethemirrorshapeandreleasethesuspendedmembrane.Finally,thecavitysizeispreciselycontrolledbyadjustin