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用水分子质谱仪进行电容器真空浸渍过程终点判断的研究 Abstract: Thispaperexplorestheuseofwatermoleculemassspectrometrytodeterminetheendpointofvacuumimpregnationincapacitors.Theexperimentshowedthatwatermoleculemassspectrometrycanaccuratelyandquantitativelyanalyzetheresidualwatercontentinthevacuumimpregnationprocessofcapacitorsandaccuratelydeterminetheendpointoftheimpregnationprocess.Thisstudyprovidesanewmethodforthemeasurementofvacuumimpregnationandprovidesguidancefortheproductionofcapacitors. Introduction: Vacuumimpregnationisacrucialprocessintheproductionofcapacitorsandreferstothemethodofimmersingcapacitorsinliquiddielectricsunderreducedpressuretoreplacetrappedairandadddielectricfluid.Crucially,achievingtherequiredvacuumandprecisefillingendpointisachallengeinvacuumimpregnation.Iftheimpregnationprocessisinsufficient,theinternalvoidsofthecapacitormaycontainair,resultinginpoorelectricalperformanceandlong-termreliabilityissues.Iftheimpregnationprocessisexcessive,itmaycauseadielectricfluidleakageanddamagethedevice.Thus,itisessentialtodeterminetheendpointoftheimpregnationprocessaccurately. Massspectrometryisapowerfulanalyticaltechniqueapplicableinthefieldofchemicalanalysis,molecularelementalcompositiondetermination,andtracecompoundanalysis.TheWaterMoleculeMassSpectrometryisamethodthatusesanexplosioninavacuumtoproduceanddetectwaterions,allowingidentificationofthepresenceofwaterinthesample. ThispaperwillexploretheWaterMoleculeMassSpectrometrytodeterminetheendpointofvacuumimpregnationincapacitors.Thefollowingwillincludetheexperimentaldesign,results,andconclusion. Experimentaldesign: Capacitorsampleswereusedtoconducttheexperiment.Twogroupsofsampleswereprepared.Bothgroupswereplacedinavacuumfurnaceandprocessedtoavacuumof100Pa.OnegroupwouldbeimmersedandimpregnatedwithSylgard184siliconeresinundervacuum,whiletheothergroupremainedinthevacuumfurnace.TheexperimentwascarriedoutontheSigma6-1TCavityClusterWaterMassSpectrometer. Theendpointoftheimpregnationprocesswasmonitoredbythenumberofwatermoleculesdetectedinsi

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