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MEMS陀螺仪共振干扰机制及防护方案研究
Title:ResearchonResonanceInterferenceMechanismandProtectionSolutionsforMEMSGyroscopes
Abstract:
MEMS(Micro-electromechanicalSystems)gyroscopeshavebecomewidelyusedinvariousapplications,includingaerospace,robotics,andnavigation.However,theresonanceinterferenceprobleminMEMSgyroscopeshashinderedtheiraccuracyandreliability.ThispaperaimstoinvestigatetheresonanceinterferencemechanisminMEMSgyroscopesandproposeeffectiveprotectionsolutionstomitigatethisissue.
Keywords:MEMSgyroscope,resonanceinterference,protectionsolutions,accuracy,reliability
1.Introduction:
MEMSgyroscopeshaverevolutionizedthefieldofmotionsensingandnavigationduetotheirsmallsize,lowpowerconsumption,andcost-effectiveness.However,oneofthemajorchallengesfacedbyMEMSgyroscopesistheresonanceinterference,whichleadstoinaccuratemeasurementsandreducedreliability.ThispaperfocusesonstudyingtheresonanceinterferencemechanisminMEMSgyroscopesandpresentsviableprotectionsolutionstoenhancetheirperformance.
2.ResonanceInterferenceMechanism:
2.1VibrationalModes:
MEMSgyroscopesrelyonvibrationalmodestodetectangularvelocity.Differentmodes,suchasthedrivemode,sensemode,andhigher-ordermodes,canbeexcitedtoachievehighersensitivityandaccuracy.However,resonanceinterferenceoccurswhenexternalvibrations,eitherenvironmentalorinducedbythesurroundingsystem,couplewiththenaturalfrequenciesofthegyroscopeanddistorttheoutputmeasurements.
2.2FactorsAffectingResonanceInterference:
SeveralfactorscontributetoresonanceinterferenceinMEMSgyroscopes,includingstructuraldesign,packaging,andoperatingconditions.Thesize,shape,andmaterialpropertiesofthegyroscopestructuredetermineitsnaturalfrequenciesandsusceptibilitytoresonance.Packagingquality,suchasdampingmaterialsandisolationmechanisms,playacrucialroleinreducingexternalvibrations.Furthermore,environmentalfactorsliketemperature,humidity,andmechanicalshocksaffectthegyroscope'soperationandmayinduceresonanceinterference.
3.MeasurementandAnalysisTechniques:
Tounderstandtheresonanceinterferencein