净液车间综合通风技术控制砷化氢效果研究-豆柴文库

您所在位置：网站首页 / 净液车间综合通风技术控制砷化氢效果研究.docx / 文档详情

在线预览结束，喜欢就下载吧，查找使用更方便

5 金币

下载文档

/ 2

下载提示

如果您无法下载资料，请参考说明：

1、部分资料下载需要金币，请确保您的账户上有足够的金币

2、已购买过的文档，再次下载不重复扣费

3、资料包下载后请先用软件解压，在使用对应软件打开

文本预览

净液车间综合通风技术控制砷化氢效果研究
Title:StudyontheComprehensiveVentilationandTechnologyControlofArsenicHydrideinthePurificationWorkshop
Abstract:
Arsenichydride,alsoknownasarsine,isahighlytoxicandflammablegas.Itiscommonlyusedinthepurificationworkshopfortheproductionofsemiconductormaterialsandasadopingagent.However,exposuretoarsinegasposesserioushealthriskstoworkers.Toensureasafeworkingenvironment,thecomprehensiveventilationandtechnologycontrolofarsineinthepurificationworkshopiscrucial.Thisstudyaimstoinvestigatetheeffectivenessofvariousventilationtechniquesandtechnologycontrolsinreducingarsineconcentrations.
1.Introduction:
Thepurificationworkshopisacriticalareainsemiconductormanufacturing,wherehighlytoxicgasessuchasarsineareusedinvariousprocesses.Properventilationplaysacriticalroleinmaintainingasafeworkingenvironmentandreducingexposuretoharmfulgases.Thispaperaimstoexplorethedifferentmethodsofventilationandtechnologycontroltoeffectivelymitigatetherisksassociatedwitharsineexposureinthepurificationworkshop.
2.LiteratureReview:
Previousstudieshaveidentifiedseveraltechniquesforcontrollingarsineconcentrationinthepurificationworkshop.Thesetechniquesincludelocalexhaustventilation,dilutionventilation,andaircurtainsystems.Moreover,technologycontrolmethodssuchasautomaticmonitoringsystemsandemergencyresponsesystemsarealsoemployedtoensurethesafetyofworkers.
3.Methodology:
Toevaluatetheeffectivenessofventilationtechniquesandtechnologycontrolmethodsinreducingarsineconcentration,acomprehensivestudywasconductedinareal-worldpurificationworkshop.Arsineconcentrationmeasurementsweretakenatvariouslocationswithintheworkshop,includinghigh-riskareassuchasthegassupplyandexhaustsystems.Differentventilationtechniquesandtechnologycontrolmethodswereimplemented,andtheresultingchangesinarsineconcentrationweremeasuredandcompared.
4.Results:
Thestudyfoundthatlocalexhaustventilationsystems,combinedwithdilutionventilation,effectivelyreducedarsineconcentrationinthepurificationworkshop.Bydirectingarsinegasemissionsto