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第1章绪论2024/11/152024/11/151.1、WhatIsMICROSYSTEMSThestatusofmicro-systemtechnology2024/11/152024/11/15TheRelationshipBetweenMicro-systemsAndTheICManufacturing2024/11/152024/11/152024/11/152024/11/152024/11/152024/11/151.2Micro-systemTechnologyBased2024/11/15RF&WirelessTechnologyRF/WirelessApplications2024/11/15OpticalTechnologyThePotentialOfOpticalTechnologyDevelopingMicroElectroMechanicalSystemsThisSubjectisCalledHistoryHistory,Cont.WhatareMEMS?PrecisionEngineeredGearsareshownheretobefabricatedbyadeepX-raylithographyandelectrodepositionprocess.Eachgearis100micronstall,madeofnickel,andareheldtosubmicrondimensions.MEMScanbeusedtocreatepartsofsystemswherehightolerancesarenecessary.ThesegearsbridgethegapbetweenMEMSandtraditionallymachinedprecisecomponents.MagneticMicroMotorscanalsobefabricatedbyadeepX-raylithographyandelectrodepositionprocess.Therotorismagneticallysalienttoallowamagneticfieldappliedtoeachofthetwopolestocausetherotortoturn.Externalloadinggearshavebeenadded.Thismotorhasbeenusedtotestthefrictioningeartrainsbyusinganexternalmagneticfieldtodrivethesalientrotor.Thisisanexampleofarotationalactuator.But,NotOnlyMiniaturizationWhatareMicrosystems?Amicrosystemisdefinedasanintelligentminiaturisedsystemcomprisingsensing,processingand/oractuatingfunctions.Thesewouldnormallycombinetwoormoreofthefollowing:electrical,mechanical,optical,chemical,biological,magneticorotherproperties,integratedontoasingleormultichiphybrid.Microsensorsdetectchangesintheparametertobecontrolled,electroniccontrollogicthenoperatesmicroactuatorsbasedoninformationfromthesensors,tobringtheparametertobecontrolledwithinthedesiredlimits.SensorsComparisonActuatorsMicrostructuresApplicationAreasofMEMSWhyisMEMSUseful?WhatisMicroengineering?MicroengineeringEnablesMarketsforMicroengineeredProductsSuccessfulApplicationsMEMS在航空、航天、汽车、生物医学、环境监控、军事以及几乎人们接触到的所有领域中都有着十分广阔的应用前景
微惯性传感器及微型惯性测量组合能应用于制导、卫星控制、汽车自动驾驶、汽车防撞气囊、汽车防抱死系统(ABS)、稳定控制和玩具
微流量系统和微分析仪可用于微推进、伤员救护
MEMS系统还可以用于医疗、高密度存储和显示、光谱分析、信息采集等等
已经制造出尖端直径为5m的可以夹起