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基于SiGe量子点实现增强F-N隧穿的低压闪速存储器(英文) Introduction Withtheincreasinglyhighdemandsforfasterandlargerstorageinmoderncomputing,flashmemoryhasbecomeanessentialcomponentintheindustry.However,theconventionalflashmemoryislimitedbyitshighprogrammingvoltage,whichincreasesthepowerconsumptionandharmsthereliabilityofthedevice.Inrecentyears,low-voltageflashmemoryhasemergedasapromisingsolution,withitsuniquedesignbasedonFowler-Nordheim(F-N)tunnellingmechanism. Inthispaper,wewillexploretheconceptofSiGequantumdotstoenhanceF-Ntunnellingandrealiselow-voltageflashmemory.Wewillfirstintroducethebasicprincipleoflow-voltageflashmemoryandthechallengesitfaces.WewillthendescribethepropertiesofSiGequantumdotsandtheirpotentialapplicationinflashmemory.Finally,wewillprovideasummaryofrecentprogressinthisfieldandourperspectivesonfutureresearchdirections. Low-VoltageFlashMemoryandItsChallenges Low-voltageflashmemoryisatypeofnon-volatilememorythatusesF-Ntunnellingtoprogramanderasethememorycells.F-Ntunnellingisaphenomenonwhereelectronstunnelthroughapotentialbarrierwithaprobabilitydeterminedbytheheightandwidthofthebarrier.Inlow-voltageflashmemory,athinoxidelayerisusedasthebarrierandahighelectricfieldisappliedtoreducethebarrierheightandwidth,allowingelectronstotunnelbetweenthefloatinggateandthesubstrate. Themainadvantageoflow-voltageflashmemoryisitslowprogrammingvoltage,whichcanbeaslowas5Vcomparedtotheconventionalflashmemory's12V.Alowprogrammingvoltagereducesthepowerconsumptionandimprovesthereliabilityofthedevice.However,low-voltageflashmemoryfacesseveralchallengesthatneedtobeaddressed. Firstly,thelowprogrammingvoltageincreasesthesensitivityofthedevicetoprocessvariations,suchasdopingfluctuationsandoxidethicknessvariations.Thesevariationscanleadtosignificantvariationsintheprogrammingcharacteristicsofthedevice,affectingitsreliabilityandperformance. Secondly,thelowprogrammingvoltagedecreasestheprogrammingspeedofthedevice.ThisisbecausetheF-Ntunnellingprobabilityisproportionaltotheappliedelectricfield,andalowelectr

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