无定形Si-C-O-N涂层的制备及其性能研究.docx

无定形Si-C-O-N涂层的制备及其性能研究
Introduction
Inrecentyears,therehasbeenagrowinginterestindevelopingnovelcoatingsthatpossesshighhardness,wearresistance,corrosionresistance,andthermalstability.OnesuchcoatingthathasgainedattentionistheamorphousSi-C-O-Ncoating,whichiscomposedofsilicon,carbon,oxygen,andnitrogen.TheSi-C-O-Ncoatinghasgarneredsignificantattentioninthefieldofmaterialsscienceduetoitsattractivecombinationofproperties,makingitsuitableforvariousapplicationssuchasmicroelectronics,aerospace,andcuttingtools.ThisreviewpaperintendstodiscussthepreparationmethodsofamorphousSi-C-O-Ncoatingsandhighlighttheirmechanical,tribological,andthermalproperties.
PreparationmethodsofamorphousSi-C-O-Ncoating
ThereareafewtechniquesusedforpreparingamorphousSi-C-O-Ncoatingsthatincludephysicalvapordeposition,chemicalvapordeposition,sol-gel,andplasma-enhancedchemicalvapordeposition.Amongthesemethods,plasma-enhancedchemicalvapordeposition(PECVD)isthemostpromisingandwidelyusedmethod.ThePECVDprocessinvolvestheapplicationofahigh-frequencyelectricfieldtoagasmixturecontainingsilicon,carbon,oxygen,andnitrogen,leadingtotheexcitationofthegasmixtureintoaplasmastate.Theplasmacausesthedecompositionofthegasmixtureintoreactivespeciesthatdepositontothesubstrateasathinfilm.
MechanicalandtribologicalpropertiesofamorphousSi-C-O-Ncoating
TheamorphousSi-C-O-NcoatingexhibitsexcellentmechanicalandtribologicalpropertiesduetoitsuniquecombinationofSi,C,O,andNelements.ThehardnessandelasticmodulusoftheSi-C-O-NcoatingcanbetailoredbyadjustingtheSi/Cratio.AhigherSi/CratioleadstoahigherhardnessandelasticmodulusduetotheformationofSi-CandSi-Nbonds,whicharestifferthanC-C,N-C,andO-Cbonds.Furthermore,theamorphousSi-C-O-Ncoatingexhibitsexcellentwearresistanceduetoitshighhardness,lowfrictioncoefficient,andsuperioradhesionstrength.ThelowfrictioncoefficientisattributedtotheformationofSi-Obonds,whichprovidelubricationattheslidingsurfaces.ThesuperioradhesionstrengthisattributedtotheincorporationofNintothecoating,whichimprovestheinterfaci